MM-3M-EX Extended
Motorized MicroMini™ Stage
Miniature Positioning Components for Industry and Laboratory including Optical Alignment Systems
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Features:  

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Specifications:
  Standard Slider AB Slider (anti-backlash)

*Repeatability:

+/- 2µm

+/- 0.5µm

*Homing Repeatability:

+/- 2µm

+/- 0.5µm

*Accuracy:

+/- 3µm

+/- 1.5µm
*Encoder resolution must be added based on the gearhead: 16:1 add ±0.5µm, 64:1 add ±0.12µm
Speed (max.): 6mm / sec 4mm/sec

Travel ranges:

0.5 inch to 2 inch (12.7 to 50.8 mm) (standard)

same

Runout:

3 µm per 25.4 mm (inch)

same

Screw pitch:

80 TPI

same

Resolution:
(Encoder conversion)

0.49609µ per count with 16:1 gearhead

0.12406µ per count w / 64:1 gearhead
†Slider Backlash: 50µm 3µm
Slider backlash represents maximum overshoot

Gearhead backlash:

1 - 2 um equivalent can be compensated in software without overshoot

Wobble (max):

0.02mrad (~4 arc-sec.)(No ball bearings)

Runout: 0.03mm/inch

Gearhead:

16:1 standard; optional 64:1, 256:1, 1024:1 - interchangeable

Thermal Stability(deg. C):

15 to 75

Vacuum Compatibility: 10-3 Torr standard, higher per request
Motor: 10 mm dia., 6-12 VDC Servo, brush type (see motor specifications)
Load Capacity:

Direct top or side load:

0.5 kg

Push:

0.5 kg

Pull:

0.5 kg

Tilt:

8 inch-oz. (560g-cm)

Twist:

4 inch-oz. (280g-cm)

Resolution Data Linear Motion:
Link to Connection Specifications for 10mm motor
MM-3M-EX
Gearhead
Resolution1
Max Travel Rate2
Ratio
µInch / per count
µm/ per count
Inch/sec
mm/sec
16:1
19.5313
0.4960
0.260
6.60
64:1
4.8828
0.1240
0.064
1.65
256:1
1.2207
0.0310
0.016
0.41
1024:1
0.3052
0.0077
0.004
0.10
Notes:
1) The lead values shown above in both travel rate and resolution calculations, are for 80 (1/80) Thread per Inch (TPI) leadscrews. For a 40 TPI leadscrew, substitute 0.025 inch lead.
2) Max travel rate calculated with motor armature running at a maximum speed of 20,000 RPM
3)The 10mm motors used with both the rotary and linear stages incorporate dual channel, 10 position, magnetic encoders. The resultant quadrature output is equal to 40 encoder counts per motor armature revolution.
Travel rate calculations
Output Shaft RPM = RPM of motor / Gearhead Ratio
Distance per minute = Output shaft RPM x Lead (0.0125 in, 0.3175mm)
Distance per second = Distance per minute / 60
Distance in millimeters = inch/39.37 X 10-3
Distance in micrometers = inch/39.37 x 10-6
Encoder resolution calculations
Encoder counts per shaft revolution = 40 encoder counts x gearhead ratio
Minimum encoder count (inches) = Lead (0.0125 in.) / Encoder counts per output shaft revolution
Minimum encoder count (millimeters) = Minimum encoder count (inch)/39.27 x 10-3
Minimum encoder count (micrometers) =Minimum encoder count (inch)/39.37 X 10-6
Conversion
1 inch (in.) = 25.4 mm
1 inch (in.) =25,400µm
1 millimeter (mm) = 39.37 x 10-3in.
1 micron (µm) = 39.37 x 10-6 in.
1 degree (deg) = 3,600 arc-sec
1 arc-sec = 0.277 x 10-3 deg
Link to Connection Specifications for 10mm motor
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PRICING:

PART#

TRAVEL

STAGE BODY (L x W x H)

Weight

PRICE

MM-3M-EX-0.5

0.5 inch (12.7 mm)

3.90 x 0.75 x 0.36 (inch)
99.1 x 19.1 x 9.1 (mm)

53g

$1665.00

MM-3M-EX-1.0

1.0 inch (25.4 mm)

4.40 x 0.75 x 0.36 (inch)
111.8 x 19.1 x 19.1 (mm)

58g

$1705.00

MM-3M-EX-1.5

1.5 inch (38.1 mm)

4.90 x 0.75 x 0.36 (inch)
124.5 x 19.1 x 9.1 (mm)

63g

$1755.00

MM-3M-EX-2.0

2.0 inch (50.8 mm)

5.40 x 0.75 x 0.36 (inch)
137.2 x 19.1 x 0.36 (mm)

68g

$1805.00

Specify -AB for Anti-Backlash
Prices shown are for the 16:1 gearhead. Other gearheads available are 64:1, 256:1 and 1024:1 at the same travel and slightly higher prices.
For our International Customers here is a link to Universal Currency Converter
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The information contained in this data sheet is subject to change without notice. Critical dimensions or specifications should be verified with our technical support staff.
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800-360-4598 • 603-893-7393 • FAX 603-893-7857